| 适用工件： (Applicable parts) | φ540*4000mm石英管 φ540*4000mm Quartz Tube |
| 批量产能： (Capacity) | 根据客户需求/Customerized |
| 工艺流程： (Procedure flow) | 小车上料→提篮石英管旋转，药液清洗→药液泵至储酸槽→纯水清洗→小车下料 Trolley Load→Tube rotation in basket,Chemicals Washing→Chemicals pump to tank of acid storage→DIW clean→Trolley Unload |
| 主要材料： (Major material) | 金属骨架包覆防腐PP,槽体采用PPN或PVDF (Metal frame,shelled with PP,the tank uses PPN or PVDF) |
| 运送方式： (Transportation) | 机械臂传送 (Robotic arm Transporation) |
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